DYNAMICS OF CHARGES OF ELECTRON AND ION FLOWS IN A LASER PLASMA SOURCE FOR THE FORMATION OF NANOSTRUCTURES

Based on conducted experiments, causes have been found for distorting the shape of the ion flux pulse supplied to the substrate in a laser plasma source for applying nanocoatings at low accelerating potentials; ways of their elimination are suggested. The design capacity of a laser plasma source, which is ~40 nF, has been determined, which is important for the conduct of subsequent experiments. It is shown that in eliminating the ion current pulse- shape distortion, a more uniform ion flow is supplied to the substrate surface, which results in an increase of the efficiency of the process of applying thin uniform nanocoatings.

Author:  V. K. Goncharov, M. V. Puzyrev
Keywords:  laser plasma, ion flows, nanostructures
Page:  1089