It is intended for acquisition of images of the micro geometric surfaces of objects of interference images in white or monochromatic light, for visualization of micro geometric surfaces of objects, for digital recording and analysis of the structure of the interference image boundaries.
  • measurement range of the parameters of the surface roughness Rmax, RZ and the film thickness: from 0.1 to 0.8 µm
  • admissible systematic error limits in Rmax, RZ measurements: 22%
  • micro interferometer magnification in ocular micrometer visualizations: 500
  • linear field of a micro interferometer in the object space in ocular micrometer visualizations: 0.30 mm
  • range of displacement of an objective table in the horizontal plane in the longitudinal and transverse directions: from 0 to 10 mm
  • wavelength of transmission maximum of interference light filters:
  • green – 533.7 nm
  • yellow – 595.0 nm
  • transmission coefficient of interference light filters:>
  • green – 38 %
  • yellow – 44 %
  • half-width of interference light filters:
  • green – 8.5 nm
  • yellow – 9 nm