SIMULATION OF PERFLUOROMETHANE DECOMPOSITION
IN AN ATMOSPHERIC-PRESSURE MICROWAVE DISCHARGE

A. P. Chernukho,a A. N. Migun, a 
B. S. A. Zhdanok, a J. C. Rostaingb 
and J. Perrinb
 
UDC 537.523.9, 539.1.04

The kinetic mechanism of transformation of perfluorohydrocarbons 
into the element system C-F-N-O has been investigated 
in detail. A two-dimensional stationary model of a reactor for decomposition 
of perfluoromethane under the conditions characteristic of a microwave 
discharge at atmospheric pressure is presented. Good agreement between 
the experimental and theoretical data has been obtained.

aA. V. Luikov Heat and Mass Transfer Institute, National Academy 
of Sciences of Belarus, 15 P. Brovka Str., Minsk, 220072, Belarus; 
email: chern@itmo.by; bAir Liquide Recherche et Development, 
France. Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 78, 
No. 2, pp. 178-188, March-April, 2005. Original article submitted 
September 30, 2004.