HIGH-TEMPERATURE DEPOSITION OF CARBON FILMS

S. P. Fisenko,a B. N. Bazylev,a 
and H. Wuerzb

UDC 621.793.1

A mathematical model of growth of a carbon film in high-temperature 
deposition has been constructed in the approximation of the Stefan 
problem. The influence of different factors on the maximum thickness 
of the film has been analyzed. It has been shown that the porosity 
of the film is a factor of fundamental importance which determines 
the dynamics of its growth in terms of the effective thermal conductivity.

aA. V. Luikov Heat and Mass 
Transfer Institute, National Academy of Sciences of Belarus, Minsk, 
Belarus; email: fsp@hmti.ac.by; bIHM, Forschungszentrum 
Karlsruhe, Germany. Translated from Inzhenerno-Fizicheskii Zhurnal, 
Vol. 76, No. 4, pp. 3-6, July-August, 2003. Original article 
submitted November 18, 2002.