HIGH-TEMPERATURE DEPOSITION OF CARBON FILMSS. P. Fisenko,a B. N. Bazylev,a and H. Wuerzb UDC 621.793.1 A mathematical model of growth of a carbon film in high-temperature deposition has been constructed in the approximation of the Stefan problem. The influence of different factors on the maximum thickness of the film has been analyzed. It has been shown that the porosity of the film is a factor of fundamental importance which determines the dynamics of its growth in terms of the effective thermal conductivity. aA. V. Luikov Heat and Mass Transfer Institute, National Academy of Sciences of Belarus, Minsk, Belarus; email: email@example.com; bIHM, Forschungszentrum Karlsruhe, Germany. Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 76, No. 4, pp. 3-6, July-August, 2003. Original article submitted November 18, 2002.