MODELING OF THE SURFACE STRUCTURE IN GASDYNAMIC PROBLEMS WITH THE USE OF THE DATA OF ATOMIC-FORCE MICROSCOPYO. E. Gerasimova,a S. F. Borisov,a C. Boragno,b and U. Valbusab UDC 533.722:541.183 The morphology of the surface of single-crystalline silicon as a function of the degree of oxidation has been investigated by the method of atomic-force microscopy. The roughness of the surface at different stages of treatment has been evaluated with the use of topographic images. It has been found that the standard deviation characterizing the distribution of microroughnesses by height, or the roughness, increases with oxidation of the sample. A histogram of the distribution of structural surface elements has been presented. The data obtained can be employed in specifying boundary conditions to gasdynamic problems. aUral State University, Ekaterinburg, Russia; email: Sergei.Borisov@usu.ru; bGenoa University, Genoa, Italy. Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 76, No. 2, pp. 151-154, March-April, 2003. Original article submitted October 11, 2002.