PRESSURE TRANSDUCER BASED ON TENSOSENSITIVE FILMS OF BISMUTH-ANTIMONY TELLURIDE
Kh. T. Igamberdiev,a K. E. Onarkulov,b R. T. Rasulov,b and D. A. Yusupovab UDC 621.362.1 A new design of a semiconductor pressure transducer based on tensosensitive films of bismuth-antimony telluride, which provides a temperature compensation for the entire device structure, is proposed. The technical data of the tensometric transducer proposed for measuring the pressure of liquids and gases are presented. aDepartment of Thermal Physics, Academy of Sciences of the Republic of Uzbekistan, Tashkent, Republic of Uzbekistan; bFergana State University, Fergana, Republic of Uzbekistan. Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 75, No. 6, pp. 66-67, November-December, 2002. Original article submitted December 11, 2001; revision submitted May 16, 2002. JEPTER74920200218 JEPTER7492018