Journal of Engineering Physics and Thermophysics is a translation of Inzhenerno-fizicheskii Zhurnal,
a publication of the Academic Scientific Complex "A. V. Luikov Heat and Mass Transfer Institute"
of the National Academy of Sciences of Belarus
Address of the Editorial Office and the Publisher



NONLINEAR DISTRIBUTION MODEL OF IONS IMPLANTED 
AT HIGH DOSES

A. L. Danilyuk

UDC 621.382

A nonlinear distribution model of ions implanted at high doses 
is  developed  with  allowance  for  sputtering, volume growth 
of a target, and retardation by interstitial atoms.

How to get Inzhenerno-Fizicheskii Zhurnal directly from the Publisher
Scientific-engineering and theoretical developments (Rus in KOI8-R) in the field of heat and mass transfer
(based on the advertisements published in Inzhenerno-Fizicheskii Zhurnal)

JEPTER7492019985 JEPTER749205