Journal of Engineering Physics and Thermophysics
is a translation of Inzhenerno-fizicheskii Zhurnal,
a publication of the Academic Scientific Complex
"A. V. Luikov Heat and Mass Transfer Institute"
of the National Academy of Sciences of Belarus
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EFFECT OF GAS-PHASE ALUMINUM-NITRIDE
LAYER MORPHOLOGY ON THE THERMAL RESISTANCE
OF Mo-AlN-Mo CYLINDRIC PACKAGES
V. P. Kobyakov
UDC 621.315.612; 66.018.4(5, 8)
Results of measurements of the thermal resistance
of Mo-AlN-Mo cylindric packages are related to the microstructure
of the ceramic and intermediate layers. It is shown that only a special
morphology of the nitride ceramic layer makes it possible to obtain
a high-density contact between the ceramic and metal layers which
is not destroyed upon subsequent heating of the package and upon thermocycling.
The required so-called "composite" morphology of nitride ceramics
can be obtained only within a narrow range of synthesis temperatures.
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