Journal of Engineering Physics and Thermophysics
is a translation of Inzhenerno-fizicheskii Zhurnal,
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"A. V. Luikov Heat and Mass Transfer Institute"
of the National Academy of Sciences of Belarus
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MODELING OF MAGNESIUM DIFFUSION IN GALLIUM ARSENIDE.
2. REDISTRIBUTION OF ION-IMPLANTED IMPURITY
V. A. Labunov, O. I. Velichko, and
S. K. Fedoruk
UDC 53.01.072:681.3
The redistribution of ion-implanted magnesium under
high-rate annealing conditions is calculated. Consideration of the
nonuniformity of the interstitial gallium atom distribution makes
it possible to explain "ascending" diffusion in the region of strong
distortions of a crystalline lattice.
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